VSLI Technology-Fabrication

Introduction to semiconductor devices; crystal growth and wafer preparation; chemical and physical vapor deposition; oxidation; diffusion; ion implantation; lithography; etching metallization, process integration of CMOS and bipolar technologies; diagnostic techniques and measurements; packaging; yield and reliability. This course is dually listed with an equivalent graduate-level course (EE 539) and requires a minimum G.P.A. of 2.75 or the instructor's permission for admission.